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Optical vibration sensor fabricated by femtosecond laser micromachining
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View: Figures


Image of FIG. 1.
FIG. 1.

Vibration sensor consisting of a waveguide written across three pieces of glass. The suspended beam supporting the central piece of glass is made of borosilicate glass; the rest of the sensor is made of soda-lime glass. The sample is translated at with respect to the microscope objective.

Image of FIG. 2.
FIG. 2.

Transmission optical microscope image of the embedded waveguide near the wide gap (dashed lines) between two pieces of glass. The gap is not visible because it is filled with index-matching oil. Although the waveguide is interrupted over a distance of , it is optically continuous.

Image of FIG. 3.
FIG. 3.

Waveguide loss dependence on lateral offset. Circles: experimental data; dashed line: fit to theory.

Image of FIG. 4.
FIG. 4.

Power spectrum of sensor response to a 100-Hz acoustic signal. The power spectrum is obtained by taking the Fourier transform of the time domain response (inset).

Image of FIG. 5.
FIG. 5.

Frequency response of the sensor at 293 K (solid line) and 343 K (dotted line).


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Optical vibration sensor fabricated by femtosecond laser micromachining