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Mechanical elasticity of single and double clamped silicon nanobeams fabricated by the vapor-liquid-solid method
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10.1063/1.2008364
/content/aip/journal/apl/87/5/10.1063/1.2008364
http://aip.metastore.ingenta.com/content/aip/journal/apl/87/5/10.1063/1.2008364
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(a) SEM image of nanowire-in-trench structures. SEM images of (b) single and (c) double clamped Si nanowires grown at the edge of the sidewalls; AFM images of (d) single and (e) double clamped Si nanowires.

Image of FIG. 2.
FIG. 2.

(a) AFM cantilever deflection vs piezo position plot (approach and retract) obtained on a single clamped nanowire at from its base. (b) Cantilever deflection plots (approach only) on the substrate and on the nanowire at 3, 4, and from its base. (c) Force vs nanowire deflection curves obtained from the cantilever deflection curves.

Image of FIG. 3.
FIG. 3.

(a) AFM cantilever deflection vs piezo position plot (approach and retract) on a double clamped nanowire at its center. (b) Cantilever deflection plots (approach only) on the substrate and on the nanowire center. (c) Force vs nanowire deflection curves obtained from the cantilever deflection curves.

Image of FIG. 4.
FIG. 4.

Deflection profiles of (a) a single and (b) a double clamped nanowire under the application of different normal forces. The experimental profiles (dots) fit remarkably well to the theoretical profiles (lines) of single and double clamped elastic beams.

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/content/aip/journal/apl/87/5/10.1063/1.2008364
2005-07-29
2014-04-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Mechanical elasticity of single and double clamped silicon nanobeams fabricated by the vapor-liquid-solid method
http://aip.metastore.ingenta.com/content/aip/journal/apl/87/5/10.1063/1.2008364
10.1063/1.2008364
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