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Selective oxidation of an individual layer in a magnetic tunnel junction through the use of thermodynamic control
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10.1063/1.2007863
/content/aip/journal/apl/87/6/10.1063/1.2007863
http://aip.metastore.ingenta.com/content/aip/journal/apl/87/6/10.1063/1.2007863
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Calculated chemical potential diagram of vs at 298 °C and 1 atm. Al composition is in terms of mole fractions of Al in Al and Co only. Oxygen potentials are dimensionless since they are normalized by RT, with R as the gas constant and T the absolute temperature. Calculated using data given elsewhere (see Ref. 1).

Image of FIG. 2.
FIG. 2.

Co photoelectron peaks from (a) pure Co–Fe, (b) Co–Fe subjected to , and (c) Co–Fe subjected to .

Image of FIG. 3.
FIG. 3.

Al photoelectron peaks from 1-nm-thick Al layers. (a) Pure Al deposited at 25 °C. (b) Pure Al deposited at 200 °C. (c) Same sample as (b) measured several weeks later. (d) Al subjected to 500 Torr of for 2.5 h at 270 °C. (e) Al subjected to 450 Torr of for 7.5 h at 225 °C. (f) Al subjected to 20 mTorr of for 10 min at 25 °C.

Image of FIG. 4.
FIG. 4.

FTIR absorbance data. The peaks indicate the presence of Al–O bonds. (a) Oxidized in , (b) repeatability check with oxidized sample after a few weeks, (c) oxidized in , 270 °C, 500 Torr, 2.5 h, (d) oxidized in , 225 °C, 450 Torr, 7.5 h. An unoxidized, pure Al sample was used for background subtraction. Identical points were chosen for base line correction in each case. The peaks are shifted with respect to one another for display purposes; however, the absorbance scale is identical for each curve.

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/content/aip/journal/apl/87/6/10.1063/1.2007863
2005-08-01
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Selective oxidation of an individual layer in a magnetic tunnel junction through the use of thermodynamic control
http://aip.metastore.ingenta.com/content/aip/journal/apl/87/6/10.1063/1.2007863
10.1063/1.2007863
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