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Straining of monocrystalline silicon thin films with the use of porous silicon as stress generating nanomaterial
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10.1063/1.2179620
/content/aip/journal/apl/88/10/10.1063/1.2179620
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/10/10.1063/1.2179620
/content/aip/journal/apl/88/10/10.1063/1.2179620
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/content/aip/journal/apl/88/10/10.1063/1.2179620
2006-03-08
2014-10-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Straining of monocrystalline silicon thin films with the use of porous silicon as stress generating nanomaterial
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/10/10.1063/1.2179620
10.1063/1.2179620
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