1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Laser-based measurement of elastic and mechanical properties of layered polycrystalline silicon structures with projection masks
Rent:
Rent this article for
USD
10.1063/1.2181187
/content/aip/journal/apl/88/10/10.1063/1.2181187
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/10/10.1063/1.2181187
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Scheme of the experimental setup for photogeneration of SAWs with a laser illuminated mask grating and the laser-PBD method for detecting the propagating SAWs.

Image of FIG. 2.
FIG. 2.

Overtone spectrum of the SAW train excited using the mask with obtained by FFT analysis from the measured SAW signal shown in the inset.

Image of FIG. 3.
FIG. 3.

Dispersion of the phase velocity for the layered polycrystalline silicon system extracted from SAW measurements using nine different grating periods. The two dashed lines were calculated with a Young’s modulus and density 1% higher (lower) and a density 1% lower (higher) than the best fit values.

Image of FIG. 4.
FIG. 4.

SEM picture of the morphology of a polycrystalline silicon sample with the silicon-oxide layer and the silicon substrate at the bottom, grown under the same conditions as the investigated sample.

Loading

Article metrics loading...

/content/aip/journal/apl/88/10/10.1063/1.2181187
2006-03-09
2014-04-20
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Laser-based measurement of elastic and mechanical properties of layered polycrystalline silicon structures with projection masks
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/10/10.1063/1.2181187
10.1063/1.2181187
SEARCH_EXPAND_ITEM