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Scheme of the experimental setup for photogeneration of SAWs with a laser illuminated mask grating and the laser-PBD method for detecting the propagating SAWs.
Overtone spectrum of the SAW train excited using the mask with obtained by FFT analysis from the measured SAW signal shown in the inset.
Dispersion of the phase velocity for the layered polycrystalline silicon system extracted from SAW measurements using nine different grating periods. The two dashed lines were calculated with a Young’s modulus and density 1% higher (lower) and a density 1% lower (higher) than the best fit values.
SEM picture of the morphology of a polycrystalline silicon sample with the silicon-oxide layer and the silicon substrate at the bottom, grown under the same conditions as the investigated sample.
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