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Laser-based measurement of elastic and mechanical properties of layered polycrystalline silicon structures with projection masks
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10.1063/1.2181187
/content/aip/journal/apl/88/10/10.1063/1.2181187
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/10/10.1063/1.2181187
/content/aip/journal/apl/88/10/10.1063/1.2181187
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/content/aip/journal/apl/88/10/10.1063/1.2181187
2006-03-09
2014-10-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Laser-based measurement of elastic and mechanical properties of layered polycrystalline silicon structures with projection masks
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/10/10.1063/1.2181187
10.1063/1.2181187
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