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Schematic drawing of experimental apparatus.
Time series of (a) etching rate and (b) exhaust gas concentration (FTIR) during the experiment with addition in a gas mixture of , , and . Gas mixture of , , and Ar were added and ignited at time , the pressure of the plasma source was adjusted to at time , then was added in at time and stopped at . Later, was added and stopped at and .
Time series of (a) etching rate and (b) exhaust gas concentration (FTIR) during the experiment of transient shut off. A gas mixture of , , and were ignited at time , and the pressure was adjusted to at time, . At time zero, the flow rate was shut off for and reopened. Finally the plasma and gases are turned off at time .
Comparison of ion species concentration with or without addition in the plasma of , , and , as measured by mass spectrometer.
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