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The (0002) XRD scan of the partially strain-relaxed heterostructure at before and after the high-temperature measurement.
The temperature dependency of the lattice parameter of . The dashed lines connect the starting and endpoint of the cooling, and the solid lines are a guide for the eye.
The temperature dependency of the residual strain of layer of thickness (a) and (b) with and without passivation layer. The dashed lines are a guide for the eye.
The temperature dependency of the strain relaxation of the 50-nm-thick layer.
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