Full text loading...
(a) AFM and (b) SEM images of the AlN PCs with periodicity/diameter of . (c) Schematic diagram of the PL setup for the optical measurement of AlN PCs.
PL spectra of (a) AlN epilayer (b) AlN PCs with periodicity/diameter of at . The PL emission intensity of AlN PCs is 20 times higher than that of unpatterned AlN epilayer.
PC size feature dependence of the PL spectra. The integrated emission intensity of AlN PCs increases with decreasing lattice constant for a constant air-filling factor .
Lattice constant dependence of the (a) PL emission peak energy and (b) light enhancement factor in AlN PCs. The solid lines are the linear fits of data. The PL emission spectral peak energy decreases, while the integrated emission intensity increases with decreasing lattice constant, .
Article metrics loading...