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Dopant profile engineering by near-infrared femtosecond laser activation
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10.1063/1.2191095
/content/aip/journal/apl/88/13/10.1063/1.2191095
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/13/10.1063/1.2191095
/content/aip/journal/apl/88/13/10.1063/1.2191095
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/content/aip/journal/apl/88/13/10.1063/1.2191095
2006-03-28
2014-08-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Dopant profile engineering by near-infrared femtosecond laser activation
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/13/10.1063/1.2191095
10.1063/1.2191095
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