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Thickness dependence of structural and piezoelectric properties of epitaxial films on Si and substrates
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10.1063/1.2185614
/content/aip/journal/apl/88/14/10.1063/1.2185614
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/14/10.1063/1.2185614
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

X-ray diffraction scan of 0.8 and thick PZT films on (001) Si substrates. The inset shows the azimuthal scan of PZT 101 reflection, which shows the PZT films on Si growth with cube-on-cube epitaxy.

Image of FIG. 2.
FIG. 2.

In-plane and out-of-plane lattice parameters vs film thickness of PZT films on (001) and (001) Si substrates.

Image of FIG. 3.
FIG. 3.

Thickness-dependent polarization of PZT films on (001) and (001) Si substrates.

Image of FIG. 4.
FIG. 4.

(a) Typical longitudinal piezoelectric coefficient of thick PZT films on (001) and (001) Si substrates. (b) Thickness dependence of longitudinal piezoelectric coefficient of PZT films on (001) and (001) Si substrates.

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/content/aip/journal/apl/88/14/10.1063/1.2185614
2006-04-07
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Thickness dependence of structural and piezoelectric properties of epitaxial Pb(Zr0.52Ti0.48)O3 films on Si and SrTiO3 substrates
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/14/10.1063/1.2185614
10.1063/1.2185614
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