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(a) AFM top-view of the surface of SOI annealed at for showing opening of square windows in the ultrathin Si template. Scale bar: . Inset: Magnified view of one window corner. (b) AFM top-view image of the surface of an SOI sample annealed further at , showing coexistence of opening of different stages in their evolution: square windows (“A”), isolated (“B”) and coalesced, star-like (“C”) openings. Scale bar: .
(Color) Sequence of AFM images documenting the different stages of the evolution of the surface of an SOI sample annealed at . (a) Initial stage: square window with thickened rims. Scale bar: . (b) Formation of faceted Si aggregates at the center of the rims. Scale bar: . (c) Branching and coalescence of the openings, and hierarchy of Si aggregates (1–4). Scale bar: .
(a) TEM cross section of a square window imaged by AFM in Fig. 1(a). (b) TEM cross section of a star-like opening showing three Si aggregates: two at the rims and one at the center of the opening. (c) Cross section of a faceted Si aggregate embedded in the dewetting front.
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