1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Mechanisms of thermally induced dewetting of ultrathin silicon-on-insulator
Rent:
Rent this article for
USD
10.1063/1.2186741
/content/aip/journal/apl/88/14/10.1063/1.2186741
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/14/10.1063/1.2186741
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(a) AFM top-view of the surface of SOI annealed at for showing opening of square windows in the ultrathin Si template. Scale bar: . Inset: Magnified view of one window corner. (b) AFM top-view image of the surface of an SOI sample annealed further at , showing coexistence of opening of different stages in their evolution: square windows (“A”), isolated (“B”) and coalesced, star-like (“C”) openings. Scale bar: .

Image of FIG. 2.
FIG. 2.

(Color) Sequence of AFM images documenting the different stages of the evolution of the surface of an SOI sample annealed at . (a) Initial stage: square window with thickened rims. Scale bar: . (b) Formation of faceted Si aggregates at the center of the rims. Scale bar: . (c) Branching and coalescence of the openings, and hierarchy of Si aggregates (1–4). Scale bar: .

Image of FIG. 3.
FIG. 3.

(a) TEM cross section of a square window imaged by AFM in Fig. 1(a). (b) TEM cross section of a star-like opening showing three Si aggregates: two at the rims and one at the center of the opening. (c) Cross section of a faceted Si aggregate embedded in the dewetting front.

Loading

Article metrics loading...

/content/aip/journal/apl/88/14/10.1063/1.2186741
2006-04-07
2014-04-16
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Mechanisms of thermally induced dewetting of ultrathin silicon-on-insulator
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/14/10.1063/1.2186741
10.1063/1.2186741
SEARCH_EXPAND_ITEM