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SEM image showing a section of the paddle resonator array. The size of the silicon square paddles is , with a thickness of . The pillar supporting the center of the paddle has a cross section and is tall. The connecting bars are long and wide.
A vibration spectrum and mode shapes for a single paddle resonator (size identical to that shown in Fig. 1) with connecting arms coupled to a frame.
The inset shows an acoustic band in the vibration spectrum of the array of coupled resonators. The excitation was provided at the center of the array and the detection laser was positioned 5 unit cells away. Solid circles in the main plot demonstrate spatial decay of the average acoustic energy of vibrations as a function of separation distance between the drive and detect laser spots. The dotted line shows an exponential fit for the decay.
Enlarged portion of the vibration spectrum and phase shift plot for paddle array with stronger coupling (paddle size, ; connecting arms, ) and wider undercut ( pillar, ). The spectrum was acquired with a separation of between drive and detection points. The slope of the line corresponds to a group velocity .
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