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Fabrication and characterizations of proton-exchanged waveguides fabricated by inductively coupled plasma technique
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10.1063/1.2191704
/content/aip/journal/apl/88/14/10.1063/1.2191704
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/14/10.1063/1.2191704
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

SIMS profiles resulting from different PE processes, -cut LN treated by (a) plasma for , (b) plasma for and then plasma for , (c) plasma for , and (d) plasma for and then plasma for .

Image of FIG. 2.
FIG. 2.

SIMS profiles of PE -cut LN in BA at for .

Image of FIG. 3.
FIG. 3.

FIB images of cross section. Channel of PE waveguide that was treated by plasma for was wide with mask.

Image of FIG. 4.
FIG. 4.

XPS spectra of LN showing the spin-orbit splitting of the Nb level: (a) virgin -cut LN, (b) treated by plasma for with the shift by arrow marked, (c) by plasma for and then by plasma for , and (d) by plasma for and then by plasma for .

Image of FIG. 5.
FIG. 5.

(Color online) AFM images: (a) virgin -cut LN surface, (b) surface treated by plasma for , (c) by plasma for and then by plasma for , and (d) by plasma for and then by plasma for .

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/content/aip/journal/apl/88/14/10.1063/1.2191704
2006-04-07
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Fabrication and characterizations of proton-exchanged LiNbO3 waveguides fabricated by inductively coupled plasma technique
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/14/10.1063/1.2191704
10.1063/1.2191704
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