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Viscous damping of microresonators for gas composition analysis
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View: Figures


Image of FIG. 1.
FIG. 1.

(a) SEM image of the lateral vibration T-shaped microresonator. The free end of the resonator is approximately away from the driving electrode. The width and the height of the resonator are 1.1 and , respectively, and the lengths are for the base of the T-shaped resonator and for the cantilever extending from the base. (b) Resonance curve obtained from the measurement of the output voltage as a function of the frequency of the gate voltage . The amplitudes of and are both set at . Left inset: measurement circuit used for piezoresistive detection. Right inset: schematic drawing showing the relationship between the input and output signals.

Image of FIG. 2.
FIG. 2.

Resonance frequency response curves of a T-shaped resonator for pressures of 0.01, 0.1, 1, 10, 30, 100, 300, and in a methane environment. Inset: relationship between relative resonance frequency and pressure for a methane environment.

Image of FIG. 3.
FIG. 3.

The relative resonance frequency as a function of pressure from 10 to in helium , methane , nitrogen , and argon environments. Inset: the relative resonance frequency shift of a resonator for the four gases at atmospheric pressure.

Image of FIG. 4.
FIG. 4.

Relative resonance frequency shift of the resonator as a function of the percent in an mixture at atmospheric pressure.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Viscous damping of microresonators for gas composition analysis