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Band offsets of nitrided ultrathin hafnium silicate films
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10.1063/1.2196235
/content/aip/journal/apl/88/16/10.1063/1.2196235
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/16/10.1063/1.2196235

Figures

Image of FIG. 1.
FIG. 1.

(a) spectra for and thick silicate layers on the substrate after nitridation at calibrated with respect to Au reference sample. Inset: corresponding VB edges. The estimated electron escape depth is less than . (b) spectrum at for the nitrided silicate. Inset: VB spectra.

Image of FIG. 2.
FIG. 2.

VB spectra for (a) and (b) nitridation series. In each case the spectra obtained at photon energy of (full circles) and (open circles) are shown. The vertical lines indicate the VB onsets, the shadow panels the different regions of the VB. The widths for the as-deposited silicate and the at are also shown. The binding energy scale has been corrected to account for final state and band-bending effects.

Image of FIG. 3.
FIG. 3.

VB onsets for as deposited silicate (full circles); nitrided silicate (open circles); and fully etched silicate (triangles) at . The binding energy scale is corrected as in Fig. 2. Inset: modification of the VB offset by the states.

Tables

Generic image for table
Table I.

Experimental valence-band offsets for the silicate before and after nitridation.

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/content/aip/journal/apl/88/16/10.1063/1.2196235
2006-04-20
2014-04-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Band offsets of nitrided ultrathin hafnium silicate films
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/16/10.1063/1.2196235
10.1063/1.2196235
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