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InP-based two-dimensional photonic crystals filled with polymers
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View: Figures


Image of FIG. 1.
FIG. 1.

SEM view of the photonic crystal holes after infiltration (a) in vacuum and (b) ambient atmosphere with TMP-3A. These holes are etched in InP substrate with a nonoptimized ICP process that results in a tapered profile. The thick polymer layer on top is torn off during cleaving for the sample shown in (a) while it is still visible in (b). The black arrows in (a) indicate where the detachment of the polymer from the sidewall is well visible.

Image of FIG. 2.
FIG. 2.

(Color online) (a) SEM view of the hole profile of an InP sample etched in the same run as the sample that was optically characterized. The dashed lines indicate the location of the InGaAsP core layer in the case of a waveguiding sample. (b) Measured transmission spectrum of an empty and infiltrated triangular lattice 2D photonic crystal with ten periods in the direction obtained by lithographic tuning (air filling ). The vertical lines represent the calculated position of the band edges for both empty and fully infiltrated holes. The inset shows a SEM top view of the measured structure. For every pattern the lattice constant in nanometer and the covered range is indicated in the top of the graph.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: InP-based two-dimensional photonic crystals filled with polymers