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AFM scans of four characteristic samples: (a) sample 6 grown under 2D step-flow growth mode as the result of high and flux ratio, (b) sample 10 grown under 3D growth mode due to low and flux ratio, (c) sample 12 with columnar structure, and (d) sample 13 with porous structure. The -axis full scale is in (a), in (b), in (c), and in (d).
Plot of the vs lattice parameters, determined by HR-XRD, for the samples of Table I. Samples of groups A and B are denoted by open circles and rhombs, respectively, sample 11 by triangle, sample 12 by star, and sample 13 by square. Group B samples exhibited tensile strain as evidenced by microcracks on the surface. All samples are compact except samples 12 and 13 which are of columnar and porous structures, respectively. Measured values reported in the literature, which are within the limits of this plot, are also shown as solid circles. The cross represents the estimated, by this work, values of unstrained InN lattice constants.
Important growth details of the studied InN on (0001) epilayers: , total thickness of deposited InN, , nucleation temperature; , growth temperature; , flux ratio during nucleation; and , flux ratio during growth. The abbreviations LT, HT, VHT, LFR, and HFR are explained in the text. The FWHM of the rocking curves (RCs) of the (0004) and diffractions as well as the determined and lattice parameters are also presented. In the last column, the growth mode of the films is described.
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