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Effect of post deposition annealing on the optical properties of films
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10.1063/1.2202689
/content/aip/journal/apl/88/19/10.1063/1.2202689
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/19/10.1063/1.2202689
/content/aip/journal/apl/88/19/10.1063/1.2202689
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/content/aip/journal/apl/88/19/10.1063/1.2202689
2006-05-09
2014-09-01
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effect of post deposition annealing on the optical properties of HfOxNy films
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/19/10.1063/1.2202689
10.1063/1.2202689
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