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N XPS spectra of films as-deposited and annealed at 500 and . The N peak decreased with the increase of annealing temperature indicates that nitrogen is replaced by oxygen during heat treatment process.
The refractive index and the extinction coefficient as a function of photon energy for samples annealed at different temperatures. The refractive index increased as a function of annealing temperature while the extinction coefficient decreased.
The real and imaginary parts of dielectric functions of films with different annealing temperatures based on the measured and the best-fitted spectra.
The optical band gap which is determined by the energy dependence characteristic of indirect allowed transition as illustrated by the vs photon energy .
Parameter values of the fitting results from all samples using TL model dispersions.
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