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Alkali-halogen plasma generation by dc magnetron discharge
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10.1063/1.2202723
/content/aip/journal/apl/88/19/10.1063/1.2202723
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/19/10.1063/1.2202723
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Schematic of alkali-halogen plasma source using double cathodes. Spiral and straight cathodes heated are set in the central axis of cylindrical anode. plasma is generated from alkali salt (KCl) by electron impact and magnetic filter.

Image of FIG. 2.
FIG. 2.

Generation property of alkali-halogen plasma without thermionic emission from the center cathode depending on for at and under . Probe characteristic for and is inseted.

Image of FIG. 3.
FIG. 3.

Plasma density depending on at and . Thermionic emission starts around .

Image of FIG. 4.
FIG. 4.

Probe negative/positive saturation current ratio and depending on .

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/content/aip/journal/apl/88/19/10.1063/1.2202723
2006-05-11
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Alkali-halogen plasma generation by dc magnetron discharge
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/19/10.1063/1.2202723
10.1063/1.2202723
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