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Processing and on-wafer test of ferroelectric film microwave varactors
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10.1063/1.2202748
/content/aip/journal/apl/88/19/10.1063/1.2202748
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/19/10.1063/1.2202748

Figures

Image of FIG. 1.
FIG. 1.

(Color online) (a) The layout of the coplanar waveguide interdigital capacitor (CPWIDC, left panel), open (middle panel), and through (right panel) structures. (b) Equivalent circuit of CPWIDC structure.

Image of FIG. 2.
FIG. 2.

(Color online) Frequency dependence of the capacitance and loss for gap CPWIDC on at various dc bias voltages. The inset shows and in a frequency range of .

Image of FIG. 3.
FIG. 3.

(Color online) Microwave properties of gap CPWIDC on to the film.

Image of FIG. 4.
FIG. 4.

(Color online) Microwave properties of gap CPWIDC on to the film.

Image of FIG. 5.
FIG. 5.

(Color online) Microwave properties of gap CPWIDC fabricated directly on to the sapphire (, cut) single crystal. Capacitance : DUT is the upper line, ground-signal-ground parasitic is the lower line; loss : DUT is the lower line, ground-signal-ground parasitic is the upper line. All the data recorded at 0, 10, 20, 30, and which overlap with each other are shown.

Tables

Generic image for table
Table I.

Comparison of CPWIDC properties for ferroelectric films grown on sapphire crystal.

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/content/aip/journal/apl/88/19/10.1063/1.2202748
2006-05-09
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Processing and on-wafer test of ferroelectric film microwave varactors
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/19/10.1063/1.2202748
10.1063/1.2202748
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