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Transfer fabrication technique for embedded and inverted micro/nanostructures
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10.1063/1.2164904
/content/aip/journal/apl/88/2/10.1063/1.2164904
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/2/10.1063/1.2164904
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Schematic illustration of transfer fabrication technique for: (a) inverted structure and (b) embedded structure.

Image of FIG. 2.
FIG. 2.

Embedded structures obtained by transfer fabrication: (a) Cross-sectional SEM of an array of void boxes fabricated on silicon substrate, (b) cross-sectional SEM of multilayer void channels fabricated on a thin film on silicon substrate, and (c) cross-sectional SEM of an embedded nanostructure ( wide channels) fabricated on silicon substrate.

Image of FIG. 3.
FIG. 3.

(a) SEM of a trapezoidal pattern made by soft molding on PUA film. (b) SEM of the inverted structure that was transferred to PEDOT-coated ITO. The inset shows the edge of the structure.

Image of FIG. 4.
FIG. 4.

Current-voltage characteristics of reference light-emitting diode (LED) device (square) that was fabricated by the conventional shade mask method and those of the device fabricated by a cathode separator with transfer fabrication (cross). The left inset shows the pixels emitting green light that are separated by . The right inset is a SEM of the cathode separator. The arrow shows the edge of the deposited cathode metal, clearly revealing that no metal is present under the separator.

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/content/aip/journal/apl/88/2/10.1063/1.2164904
2006-01-13
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Transfer fabrication technique for embedded and inverted micro/nanostructures
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/2/10.1063/1.2164904
10.1063/1.2164904
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