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x-ray diffraction patterns of ZnO:Ag films grown at various deposition temperatures such as (a) , (b) , (c) , and (d) .
(a) The change of (0002) peak positions of ZnO:Ag films, and (b) that of -axis lattice constant depending on deposition temperature.
Carrier concentration and resistivity of Ag-doped ZnO films depending on deposition temperatures (◻: hole concentration, ∎: electron concentration, and ▴: resistivity).
PL spectra of (a) undoped ZnO, and (b) Ag-doped -type ZnO films measured at .
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