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Effective fabrication of three-dimensional nano/microstructures in a single step using multilayered stamp
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10.1063/1.2204448
/content/aip/journal/apl/88/20/10.1063/1.2204448
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/20/10.1063/1.2204448
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(Color online) Schematic illustration of the fabrication procedure of the multilayered stamp and the UV-nanoimprint process for the creation of nano/micropatterns in a single step.

Image of FIG. 2.
FIG. 2.

(a) Schematic illustration of -plasma ashing effect. The initial linewidth is reduced to the thinned linewidth by the ashing process. Scanning electron microscopy (SEM) images of 2D polymer patterns before and after -plasma ashing; [(b) and (c)] the initial state of patterns fabricated by two-photon polymerization. Images of (d) and (e) are the thinned patterns by the -plasma ashing corresponding to (b) and (c), respectively. The linewidth in the honeycomb structure becomes from the of the initial image.

Image of FIG. 3.
FIG. 3.

(Color online) SEM images of some imprinted 3D and multilevel structures; (a) schematic sequential procedures of creating 3D face shape from designed shape to imprinted result: computer-aided design (CAD), SEM image of fabricated 3D convex face shape (stamp, the scale bar is ), and 3D concave shape (imprinted result). [(b) and (c)] Imprinted two circular rings and two rectangular rings (, ); the inserts are the image of corresponding multilayered stamps , and all scale bar is . (d) Imprinted cone-shaped microstructure (shown in the insert, the scale bar represents ). (e) Various imprinted 2D patterns; the inserts are the image of fabricated stamps.

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/content/aip/journal/apl/88/20/10.1063/1.2204448
2006-05-15
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effective fabrication of three-dimensional nano/microstructures in a single step using multilayered stamp
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/20/10.1063/1.2204448
10.1063/1.2204448
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