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Fabrication of metallic air bridges using multiple-dose electron beam lithography
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10.1063/1.2204833
/content/aip/journal/apl/88/20/10.1063/1.2204833
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/20/10.1063/1.2204833
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(Color online) Schematic diagram of the air-bridge fabrication process.

Image of FIG. 2.
FIG. 2.

(Color online) Penetration depth of electrons into PMMA (950K) (PM), AR-U4060 (U60) and AR-U4040 (U40) with energies of 4, 5, and .

Image of FIG. 3.
FIG. 3.

(Color online) Air bridges fabricated using AR-U4040 with different doses showing three areas profile: [(a) and (b)] the feet (1), support (2), and the span with height about (3), (c) no span exposure, low dose in the rest, (d) with span and appropriate dose, (e) with span and high dose, (f) with overdose, and with [(g) and (h)] different electron energies. The white bar corresponds to .

Image of FIG. 4.
FIG. 4.

Air bridges fabricated using AR-U4060 with different doses: (a) no span exposure and low dose, (b) with span and appropriate dose, and (c) with overdose. The white bar corresponds to .

Image of FIG. 5.
FIG. 5.

(Color online) Air bridges fabricated using single layer of PMMA: [(a)–(c)] with different doses (with the span and feet but no support exposure) and (d) with different electron energy. The white bar corresponds to .

Image of FIG. 6.
FIG. 6.

(Color online) Some examples of useful structures fabricated using AR-U4040. The white bar corresponds to .

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/content/aip/journal/apl/88/20/10.1063/1.2204833
2006-05-15
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Fabrication of metallic air bridges using multiple-dose electron beam lithography
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/20/10.1063/1.2204833
10.1063/1.2204833
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