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(Color online) Schematic diagram of the air-bridge fabrication process.
(Color online) Penetration depth of electrons into PMMA (950K) (PM), AR-U4060 (U60) and AR-U4040 (U40) with energies of 4, 5, and .
(Color online) Air bridges fabricated using AR-U4040 with different doses showing three areas profile: [(a) and (b)] the feet (1), support (2), and the span with height about (3), (c) no span exposure, low dose in the rest, (d) with span and appropriate dose, (e) with span and high dose, (f) with overdose, and with [(g) and (h)] different electron energies. The white bar corresponds to .
Air bridges fabricated using AR-U4060 with different doses: (a) no span exposure and low dose, (b) with span and appropriate dose, and (c) with overdose. The white bar corresponds to .
(Color online) Air bridges fabricated using single layer of PMMA: [(a)–(c)] with different doses (with the span and feet but no support exposure) and (d) with different electron energy. The white bar corresponds to .
(Color online) Some examples of useful structures fabricated using AR-U4040. The white bar corresponds to .
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