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Systematic approach for analyzing reflectance-difference spectra: Application to silicon-dielectric interfaces
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10.1063/1.2204844
/content/aip/journal/apl/88/20/10.1063/1.2204844
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/20/10.1063/1.2204844
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

RD spectra for a interface oriented 5° off (111) toward for a series of azimuth angles centered about the value for the null spectrum.

Image of FIG. 2.
FIG. 2.

RD spectra for a interface oriented 5° off (111) toward for a series of azimuth angles centered about the value for the null spectrum.

Image of FIG. 3.
FIG. 3.

(Color online) Comparison of RD spectra of interfaces oriented 5° off (111) toward after annealing.

Image of FIG. 4.
FIG. 4.

(Color online) Comparison of RD spectra of interfaces oriented 5° off (111) toward after annealing.

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/content/aip/journal/apl/88/20/10.1063/1.2204844
2006-05-19
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Systematic approach for analyzing reflectance-difference spectra: Application to silicon-dielectric interfaces
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/20/10.1063/1.2204844
10.1063/1.2204844
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