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FTIR spectrum of a -thick film deposited on nano-D interlayer at the bias voltage of .
(a) FTIR and (b) UV Raman spectra of films of different thicknesses grown at . The Raman spectrum of an uncoated nano-D film is cited as a reference in (b).
(a) Surface and (b) cross-sectional SEM images of a -thick film coated on nano-D/silicon substrate.
UV Raman spectra of films with the same thickness of grown at and , respectively. The inset shows their corresponding FTIR spectra.
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