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Structural analysis of cubic boron nitride films by ultraviolet Raman spectroscopy
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10.1063/1.2207994
/content/aip/journal/apl/88/24/10.1063/1.2207994
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/24/10.1063/1.2207994
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

FTIR spectrum of a -thick film deposited on nano-D interlayer at the bias voltage of .

Image of FIG. 2.
FIG. 2.

(a) FTIR and (b) UV Raman spectra of films of different thicknesses grown at . The Raman spectrum of an uncoated nano-D film is cited as a reference in (b).

Image of FIG. 3.
FIG. 3.

(a) Surface and (b) cross-sectional SEM images of a -thick film coated on nano-D/silicon substrate.

Image of FIG. 4.
FIG. 4.

UV Raman spectra of films with the same thickness of grown at and , respectively. The inset shows their corresponding FTIR spectra.

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/content/aip/journal/apl/88/24/10.1063/1.2207994
2006-06-15
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Structural analysis of cubic boron nitride films by ultraviolet Raman spectroscopy
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/24/10.1063/1.2207994
10.1063/1.2207994
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