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Neutron-enhanced annealing of radiation damage formed by self-ion implantation in silicon
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10.1063/1.2211927
/content/aip/journal/apl/88/24/10.1063/1.2211927
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/24/10.1063/1.2211927

Figures

Image of FIG. 1.
FIG. 1.

RBS/C spectra of the amorphized sample after neutron irradiation (closed circles) and thermal annealing (open circles) at , together with the spectrum of the as-implanted sample (triangles).

Image of FIG. 2.
FIG. 2.

RBS/C spectra of the heavily disordered sample after neutron irradiation (closed circles) and thermal annealing (open circles) at , together with the spectrum of the as-implanted sample (triangles). (a) All the spectra. (b) Enlarged spectra for the annealed samples.

Tables

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Table I.

Efficiencies of neutron-enhanced annealing compared with ion beam annealing.

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/content/aip/journal/apl/88/24/10.1063/1.2211927
2006-06-15
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Neutron-enhanced annealing of radiation damage formed by self-ion implantation in silicon
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/24/10.1063/1.2211927
10.1063/1.2211927
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