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Ruthenium gate electrodes on and : Sensitivity to hydrogen and oxygen ambients
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10.1063/1.2212288
/content/aip/journal/apl/88/24/10.1063/1.2212288
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/24/10.1063/1.2212288
/content/aip/journal/apl/88/24/10.1063/1.2212288
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/content/aip/journal/apl/88/24/10.1063/1.2212288
2006-06-16
2014-08-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Ruthenium gate electrodes on SiO2 and HfO2: Sensitivity to hydrogen and oxygen ambients
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/24/10.1063/1.2212288
10.1063/1.2212288
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