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AlN thin film as waveguide for shear acoustic waves
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10.1063/1.2213510
/content/aip/journal/apl/88/24/10.1063/1.2213510
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/24/10.1063/1.2213510
/content/aip/journal/apl/88/24/10.1063/1.2213510
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/content/aip/journal/apl/88/24/10.1063/1.2213510
2006-06-14
2014-09-02
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: AlN thin film as waveguide for shear acoustic waves
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/24/10.1063/1.2213510
10.1063/1.2213510
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