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AlN thin film as waveguide for shear acoustic waves
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10.1063/1.2213510
/content/aip/journal/apl/88/24/10.1063/1.2213510
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/24/10.1063/1.2213510
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Frequency spectrum (returned loss) of SSBW and SH-APM device fabricated on thick double side polished -cut quartz plate. Signal was averaged 16 times.

Image of FIG. 2.
FIG. 2.

Calculated and measured frequencies of SSBW mode and of the first 50 SH-APMs propagating in the device.

Image of FIG. 3.
FIG. 3.

Effect of the deposition of thick AlN thin film on the device frequency spectrum (a) in the frequency range and (b) in the frequency range. Solid line: device without AlN overlayer. Dotted line: device with AlN overlayer. Signals were averaged 16 times.

Image of FIG. 4.
FIG. 4.

(a) Fractional change in phase velocity vs SH-SAW mode (out of range for SSBW mode). (b) Fractional change in coupling vs SH-SAW mode. Lines are guide to the eye.

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/content/aip/journal/apl/88/24/10.1063/1.2213510
2006-06-14
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: AlN thin film as waveguide for shear acoustic waves
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/24/10.1063/1.2213510
10.1063/1.2213510
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