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Frequency spectrum (returned loss) of SSBW and SH-APM device fabricated on thick double side polished -cut quartz plate. Signal was averaged 16 times.
Calculated and measured frequencies of SSBW mode and of the first 50 SH-APMs propagating in the device.
Effect of the deposition of thick AlN thin film on the device frequency spectrum (a) in the frequency range and (b) in the frequency range. Solid line: device without AlN overlayer. Dotted line: device with AlN overlayer. Signals were averaged 16 times.
(a) Fractional change in phase velocity vs SH-SAW mode (out of range for SSBW mode). (b) Fractional change in coupling vs SH-SAW mode. Lines are guide to the eye.
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