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SIMS depth profiles of oxygen concentration from (a) samples A–C. Region I and region II are for sample C only; (b) sample D and reference sample.
A cross-sectional TEM image of sample C. The image was taken along the zone axis.
HRTEM images of (a) the bright “dot” observed in Fig. 2; (b) the needlelike defect lies in the picture plane in Fig. 2.
SIMS profiles of N concentration from reference sample and sample C.
Sample annealing conditions.
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