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Femtogram mass sensing platform based on lateral extensional mode piezoelectric resonator
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View: Figures


Image of FIG. 1.
FIG. 1.

(Color online) (a) SEM photo of the lateral extensional-mode piezoelectric resonator whose resonant frequency is determined by its width . (b) Cross-sectional view of the resonator for mass sensing in vapor.

Image of FIG. 2.
FIG. 2.

(Color online) (a) Measured impedance characteristics (magnitude and phase) of a typical lateral extensional mode piezoelectric resonator with area. (b) Measured resonator characteristics in air, in air with parylene coating, and in water with parylene coating.

Image of FIG. 3.
FIG. 3.

Measured resonant frequency shifts vs loaded mass of Al film evaporated only on the resonator top surface (a) and mass of the parylene coated on the resonator sidewalls (b). The Al added on the top surface has little effect on the resonant frequency, while the parylene added on the sidewalls has pronounced effect on the resonant frequency.

Image of FIG. 4.
FIG. 4.

(Color online) (a) Noise floor of the mass sensor with the resonator’s being . The standard deviation of the resonant frequency variation is about (i.e., ), and is equivalent to a mass change of about . (b) Measured response of the resonator coated with parylene. The A, B, and C indicate the time points when different amounts of isopropanol are added. The minimum controllable frequency shit of corresponds to an added mass of about .


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Scitation: Femtogram mass sensing platform based on lateral extensional mode piezoelectric resonator