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Pulsed mode operation of strained microelectromechanical resonators in air
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10.1063/1.2213950
/content/aip/journal/apl/88/25/10.1063/1.2213950
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/25/10.1063/1.2213950
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Figures

Image of FIG. 1.
FIG. 1.

(Color online) Maximum quality factor of micro- and nanoelectromechanical resonators vs volume (after Ref. 3). In addition, two examples for the operation of NEMS resonators are shown: the filled area represents the results obtained at normal pressure in this work and the arrows point on the highest and the lowest quality factor for a NEMS resonator operating in vacuum and at normal pressure, respectively, after Ref. 12.

Image of FIG. 2.
FIG. 2.

(Color online) (a) Schematic experimental setup for the pulsed mode operation, (b) scanning-electron microscope images of SiC resonators with a width and a thickness of and , respectively, and a length of , and (c) a typical measured damping of the oscillating resonator beam.

Image of FIG. 3.
FIG. 3.

(Color online) (a) Resonant frequency and (b) quality factor measured for two different sets of resonator beams operating in air. The lines represent the calculation using Eqs. (3) and (4). (meas) and (calc) represent measured and calculated data, respectively, which differ by a constant factor of about 2.5.

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/content/aip/journal/apl/88/25/10.1063/1.2213950
2006-06-19
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Pulsed mode operation of strained microelectromechanical resonators in air
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/25/10.1063/1.2213950
10.1063/1.2213950
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