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Density determination of focused-electron-beam-induced deposits with simple cantilever-based method
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10.1063/1.2158516
/content/aip/journal/apl/88/3/10.1063/1.2158516
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/3/10.1063/1.2158516

Figures

Image of FIG. 1.
FIG. 1.

Principle of density determination of FEB deposits. (a) FEB-induced tip deposition on an AFM cantilever with injected precursor gas (not at scale). (b) Resonance frequency measured before and after removing the tip deposit in an AFM setup. The insets show corresponding SEM images needed to determine the removed tip volume.

Image of FIG. 2.
FIG. 2.

Mass-versus-volume plot of tip deposits grown with (hfac)CuVTMS at 25 kV and beam currents varying from 100 pA to 1 nA. The defocus exposure at 500 pA results in low density.

Image of FIG. 3.
FIG. 3.

Deposit density plotted versus number of electrons per deposited atom, see Eq. (2). Deposit compositions are given in generalized form, where M stands for the cabonaceous matrix.

Tables

Generic image for table
Table I.

Density calculations for the carbonaceous matrix in deposits from TMOS and (hfac)CuVTMS. Densities are taken as: , and . Deposit densities and compositions are measured values.

Generic image for table
Table II.

Comparison of measured and compositional densities of deposits from and . Densities are taken as: Co , carbon (-C:H): , P , Rh . The compositional density of is calculated according to .

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/content/aip/journal/apl/88/3/10.1063/1.2158516
2006-01-18
2014-04-16
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Density determination of focused-electron-beam-induced deposits with simple cantilever-based method
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/3/10.1063/1.2158516
10.1063/1.2158516
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