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Small angle scattering intensity curves, per unit area, for selected samples, showing enhanced scattering from grown on H-term Si. Azimuthal angle range is 45°–60°, and grazing incidence angle is 0.35°. Solid curves show excellent fits to the data.
Scattering feature size distributions, per unit area, for selected samples: (a) 1, 25, and 60 cycle samples grown on Chemox Si and (b) 5, 20, and 80 cycle samples grown on H-term Si.
Volume of scattering features per film area, normalized to the 25 cycle film grown on Chemox Si, as a function of layer thickness.
Comparison of layer thickness determined from reflectivity curves and RBS measurements, for layers grown on (a) Chemox Si and (b) H-term Si. The curves are guides for the eye.
films used in this study.
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