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Effect of thickness on the crystallization of ultrathin HfSiON gate dielectrics
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10.1063/1.2165182
/content/aip/journal/apl/88/3/10.1063/1.2165182
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/3/10.1063/1.2165182
/content/aip/journal/apl/88/3/10.1063/1.2165182
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/content/aip/journal/apl/88/3/10.1063/1.2165182
2006-01-17
2014-12-26
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effect of thickness on the crystallization of ultrathin HfSiON gate dielectrics
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/3/10.1063/1.2165182
10.1063/1.2165182
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