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Ion scattering and electron spectroscopy of the chemical species at a HF-prepared Si(211) surface
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10.1063/1.2166682
/content/aip/journal/apl/88/3/10.1063/1.2166682
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/3/10.1063/1.2166682
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

One keV ion scattering spectrum of a H-terminated Si(211) surface.

Image of FIG. 2.
FIG. 2.

Thermodesorption spectrum of a H-terminated Si(211) surface formed with a HF spin drip process.

Image of FIG. 3.
FIG. 3.

(Color) One keV ion scattering spectrum during H removal from a H-terminated surface. The inset represents and vs time for F and Si; where is the measured intensity, is the initial intensity and is the final intensity of the secondary ion yields.

Image of FIG. 4.
FIG. 4.

XPS spectrum of a cleaned H-terminated Si(211) surface with (a) thermal desorption, (b) ions, and (c) ions.

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/content/aip/journal/apl/88/3/10.1063/1.2166682
2006-01-19
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Ion scattering and electron spectroscopy of the chemical species at a HF-prepared Si(211) surface
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/3/10.1063/1.2166682
10.1063/1.2166682
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