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Optical emission spectroscopy study for optimization of carbon nanotubes growth by a triode plasma chemical vapor deposition
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10.1063/1.2166690
/content/aip/journal/apl/88/3/10.1063/1.2166690
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/3/10.1063/1.2166690
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

The OES spectra with various mesh bias voltages of (a), (b), (c), (d), and (e).

Image of FIG. 2.
FIG. 2.

The relative intensities of radicals as a function of mesh bias voltage.

Image of FIG. 3.
FIG. 3.

SEM images of CNTs with relative flow rate ratio to is 15% (a), 30% (b), 40% (c), 50% (d). The mesh bias was kept at with substrate electrode being at .

Image of FIG. 4.
FIG. 4.

The relative intensities of CH, , and CN radicals with relative flow rate ratio to with the mesh bias voltage of .

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/content/aip/journal/apl/88/3/10.1063/1.2166690
2006-01-20
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Optical emission spectroscopy study for optimization of carbon nanotubes growth by a triode plasma chemical vapor deposition
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/3/10.1063/1.2166690
10.1063/1.2166690
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