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Gas diffusion barriers on polymers using atomic layer deposition
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10.1063/1.2168489
/content/aip/journal/apl/88/5/10.1063/1.2168489
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/5/10.1063/1.2168489
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Schematic of the HTO water test to measure the water vapor transmission rate. LiCl absorbs the HTO that permeates through the ALD-coated polymer film.

Image of FIG. 2.
FIG. 2.

Water vapor transmission rate (WVTR) data for a PEN film with a ALD coating. The WVTR averaged .

Image of FIG. 3.
FIG. 3.

Water vapor transmission rates versus thickness of the ALD films grown at on PEN.

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/content/aip/journal/apl/88/5/10.1063/1.2168489
2006-01-31
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Gas diffusion barriers on polymers using Al2O3 atomic layer deposition
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/5/10.1063/1.2168489
10.1063/1.2168489
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