1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Membrane folding to achieve three-dimensional nanostructures: Nanopatterned silicon nitride folded with stressed chromium hinges
Rent:
Rent this article for
USD
10.1063/1.2168516
/content/aip/journal/apl/88/5/10.1063/1.2168516
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/5/10.1063/1.2168516
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

The silicon nitride membrane is the structural layer, the chromium hinge is the stress layer, and the silicon substrate is the release layer. The fold angle of each device is proportional to the length of the chromium hinge. Data from the pictures are listed as (hinge length, fold angle): (a) , 20°, (b) , 45°, (c) , 70°, and (d) , 90°. The width of the membranes is in (a) and in (b)–(d). The length is in (a), in (b) and (c), and in (d).

Image of FIG. 2.
FIG. 2.

(a) Each of the four hinges is long and has folded to 45°. The total fold angle is 180°. The entire membrane is long and wide. (b) A single fold to almost 180°. The hinge is long. (c) A partially folded corner cube structure. The membranes are folded to approximately 60°.

Image of FIG. 3.
FIG. 3.

A membrane folded to 45° with a grating patterned in the center. The fold angle was measured within the scanning electron microscope by rotating the membrane parallel to the electron beam. The grating period is 200 nm and it is etched 80 nm into the silicon nitride membrane. The bending radius of the hinge was .

Image of FIG. 4.
FIG. 4.

Three identical hinges ( long) curled to approximately 120° to form this triangular shape. The lengths of the two folded faces of the triangle are and they are both patterned with 200 nm period gratings in the circular regions. The bending radius was .

Loading

Article metrics loading...

/content/aip/journal/apl/88/5/10.1063/1.2168516
2006-01-31
2014-04-18
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Membrane folding to achieve three-dimensional nanostructures: Nanopatterned silicon nitride folded with stressed chromium hinges
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/5/10.1063/1.2168516
10.1063/1.2168516
SEARCH_EXPAND_ITEM