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Membrane folding to achieve three-dimensional nanostructures: Nanopatterned silicon nitride folded with stressed chromium hinges
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10.1063/1.2168516
/content/aip/journal/apl/88/5/10.1063/1.2168516
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/5/10.1063/1.2168516
/content/aip/journal/apl/88/5/10.1063/1.2168516
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/content/aip/journal/apl/88/5/10.1063/1.2168516
2006-01-31
2014-10-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Membrane folding to achieve three-dimensional nanostructures: Nanopatterned silicon nitride folded with stressed chromium hinges
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/5/10.1063/1.2168516
10.1063/1.2168516
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