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Direct etch method for microfludic channel and nanoheight post-fabrication by picoliter droplets
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10.1063/1.2170143
/content/aip/journal/apl/88/5/10.1063/1.2170143
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/5/10.1063/1.2170143
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(Color online) (a) The design and operation of the micromachined droplet generator, and formation of a droplet from an orifice. (b) Energy required for ejection versus droplet radius for three orifice diameters of 2, 4, and . (c) The setup for droplet based etching, wherein the ejector is on the top facing downwards, etching patterns on the thin-film coated silicon surface. (d) Micromachined multiple orifice membrane based two-dimensional ejector arrays, and front view of membranes with orifices with periodicity.

Image of FIG. 2.
FIG. 2.

(Color online) (a) A single acetone droplet and two overlapping droplets placed side by side etching photoresist coated surface of a wafer. (b) Multiple overlapping droplets ejected on photoresist etching a line. (c) Etch profiles through the profile lines of (a). (d) The profile of the etched line through the profile line of (b).

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/content/aip/journal/apl/88/5/10.1063/1.2170143
2006-02-01
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Direct etch method for microfludic channel and nanoheight post-fabrication by picoliter droplets
http://aip.metastore.ingenta.com/content/aip/journal/apl/88/5/10.1063/1.2170143
10.1063/1.2170143
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