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(a) Processing sequence of the -GaN template for subsequent sidewall lateral overgrowth. (b) Schematic of the growth stages of sidewall lateral epitaxial overgrowth (SLEO).
Atomic force microscopy (AFM) images of -GaN: (a) planar -GaN (6 nm rms); (b) (window/wing) stripes single-step LEO -GaN (5.82 nm rms); (c) (window/wing) stripes sidewall LEO -GaN (0.62 nm rms).
(a) Cross-sectional SEM of the coalesced SLEO -plane GaN film with (window/wing) stripes. (b) Panchromatic CL image of the top surface of the coalesced SLEO -plane GaN film. (c) Schematic cross section of the coalesced SLEO -plane GaN film showing the coalescence fronts.
Surface roughness from AFM images, x-ray rocking curve widths and threading dislocation density for: planar -GaN, single step LEO -GaN ( window/wing stripes), and SLEO -GaN.
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