Full text loading...
Photoluminescence spectra of Si nanocrystals as a function of oxygen pressure. All the PL spectra were normalized and the scaling factors are indicated in the figure. In the inset, we display the normalized PL spectrum of the sample deposited under as a function of excitation power from .
XRD analysis of Si nanocrystals: (a) (111) XRD peak of as-deposited samples ; (b) (111) XRD peak of annealed samples deposited under ; and (c) nanocrystal size calculated from the broadening of (111) XRD peak as a function of oxygen pressure.
Si nanocrystal size calculated from XRD and PL data as a function of the ratio “ nonoxydized Si/total Si” obtained by XPS analysis in as-deposited films. In the inset, an example of Si peak deconvolution onto nonoxidized and oxidized (Si–O) components (sample deposited under ).
Si nanocrystal size calculated from simulations of PL spectra.
Article metrics loading...