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Anodic aluminum oxide membrane bonded on a silicon wafer for carbon nanotube field emitter arrays
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10.1063/1.2216357
/content/aip/journal/apl/89/1/10.1063/1.2216357
http://aip.metastore.ingenta.com/content/aip/journal/apl/89/1/10.1063/1.2216357
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Figures

Image of FIG. 1.
FIG. 1.

The schematics of fabrication of the open- and closed-tip CNTs. The processes correspond to (a) removing the manicure coated on an AAO membrane and bonding of the membrane on a silicon wafer, (b) fabrication of open-tip CNTs, (c) ion millings and etching in acid solution, and (d) fabrication of closed-tip CNTs by exposure to acetylene gas followed by ion milling.

Image of FIG. 2.
FIG. 2.

SEM images of the [(a) and (b)] open- and (c) closed-tip CNTs fabricated on AAO membranes bonded on Si wafers, after being etched in acid solution. The average diameter and length of CNTs are about 50 and , respectively. The intertube distance and the tube height are about the same value around .

Image of FIG. 3.
FIG. 3.

Field emission current density vs the applied electric field for the (a) open- and (b) closed-tip CNTs fabricated on AAO membranes bonded on highly doped -type Si wafers. Inset is the Fowlor-Nordheim plots.

Image of FIG. 4.
FIG. 4.

Emission stability of the (a) open- and (b) closed-tip CNT field emitters, continuously operated in a dc mode. Inset is a field emission image of the open-tip CNTs by applying a field of

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/content/aip/journal/apl/89/1/10.1063/1.2216357
2006-07-07
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Anodic aluminum oxide membrane bonded on a silicon wafer for carbon nanotube field emitter arrays
http://aip.metastore.ingenta.com/content/aip/journal/apl/89/1/10.1063/1.2216357
10.1063/1.2216357
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