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FT-IR absorption spectra of prepared using NB-MBD, B-MBD, and PECVD.
(a) FWHM of the IR absorption peaks centered at plotted against the content. (b) FWHM of the IR absorption peaks centered at plotted against the peak position. The scale bar and solid rectangles (B1, B2, and B3) show the typical values for bulk hydride species. The shaded rectangles (S1, S2, and S3) represent typical values for surface hydride species.
Result of the peak separation analysis: the infrared absorption peaks of NB-MBD samples were fitted by three Gaussian peaks centered at 2000, 2095, and , which were assumed to correspond to the typical IR absorption peaks of bulk SiH (B1), bulk (B2), and surface SiH (S1), respectively.
Hydride species and corresponding peak position and FWHM, from Ref. 22.
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