1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Unusual hydrogen distribution and its change in hydrogenated amorphous silicon prepared using bias electric-field molecular beam deposition
Rent:
Rent this article for
USD
10.1063/1.2219119
/content/aip/journal/apl/89/1/10.1063/1.2219119
http://aip.metastore.ingenta.com/content/aip/journal/apl/89/1/10.1063/1.2219119

Figures

Image of FIG. 1.
FIG. 1.

FT-IR absorption spectra of prepared using NB-MBD, B-MBD, and PECVD.

Image of FIG. 2.
FIG. 2.

(a) FWHM of the IR absorption peaks centered at plotted against the content. (b) FWHM of the IR absorption peaks centered at plotted against the peak position. The scale bar and solid rectangles (B1, B2, and B3) show the typical values for bulk hydride species. The shaded rectangles (S1, S2, and S3) represent typical values for surface hydride species.

Image of FIG. 3.
FIG. 3.

Result of the peak separation analysis: the infrared absorption peaks of NB-MBD samples were fitted by three Gaussian peaks centered at 2000, 2095, and , which were assumed to correspond to the typical IR absorption peaks of bulk SiH (B1), bulk (B2), and surface SiH (S1), respectively.

Tables

Generic image for table
Table I.

Hydride species and corresponding peak position and FWHM, from Ref. 22.

Loading

Article metrics loading...

/content/aip/journal/apl/89/1/10.1063/1.2219119
2006-07-06
2014-04-19
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Unusual hydrogen distribution and its change in hydrogenated amorphous silicon prepared using bias electric-field molecular beam deposition
http://aip.metastore.ingenta.com/content/aip/journal/apl/89/1/10.1063/1.2219119
10.1063/1.2219119
SEARCH_EXPAND_ITEM