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Metal transport and loss in ultrathin hafnium aluminate films on silicon studied by low, medium, and high energy ion beam analyses
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10.1063/1.2219150
/content/aip/journal/apl/89/1/10.1063/1.2219150
http://aip.metastore.ingenta.com/content/aip/journal/apl/89/1/10.1063/1.2219150
/content/aip/journal/apl/89/1/10.1063/1.2219150
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/content/aip/journal/apl/89/1/10.1063/1.2219150
2006-07-06
2014-11-01
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Metal transport and loss in ultrathin hafnium aluminate films on silicon studied by low, medium, and high energy ion beam analyses
http://aip.metastore.ingenta.com/content/aip/journal/apl/89/1/10.1063/1.2219150
10.1063/1.2219150
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