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Insights into the origin of threading dislocations in from atomic force microscopy
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10.1063/1.2219747
/content/aip/journal/apl/89/1/10.1063/1.2219747
http://aip.metastore.ingenta.com/content/aip/journal/apl/89/1/10.1063/1.2219747
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Overview AFM images of (a) sample A, image height , and (b) sample B, .

Image of FIG. 2.
FIG. 2.

AFM amplitude image of sample A showing coalescing hexagonal islands. The outlines of the two islands are highlighted by solid black lines. The boundary between them is highlighted by a dotted black line. The “boundary region” (as defined in the text) is highlighted by a heavy white box and the positions of TDs intersecting the (0001) surface by black circles.

Image of FIG. 3.
FIG. 3.

A coalescence boundary in sample B. White dashed lines highlight trench features related to coalescence. A dislocation array is seen running at 90° to the apparent boundary—highlighted by black arrows.

Image of FIG. 4.
FIG. 4.

(a) A three-dimensionally rendered AFM topography image showing a small island (highlighted by a black arrow) being overgrown by a large island. Lateral scale: /division, vertical scale: /division. (b) A higher magnification AFM amplitude image of the smaller island indicated in (a). TDs impinging on the small island’s surface are highlighted by black circles. Note the surface step near the center of the small island.

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/content/aip/journal/apl/89/1/10.1063/1.2219747
2006-07-07
2014-04-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Insights into the origin of threading dislocations in GaN∕Al2O3 from atomic force microscopy
http://aip.metastore.ingenta.com/content/aip/journal/apl/89/1/10.1063/1.2219747
10.1063/1.2219747
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