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(Color online) Surface morphology during deposition of 1 ML at : (a) starting surface with regular train of ML steps and after deposition of (b) 0.25, (c) 0.5, and (d) 1 ML. Simulation cell size is sites with a terrace length sites.
(Color online) Morphology of silicon layers obtained by KMC simulation after the deposition of 800 ML at (a) 200, (b) 300, and (c) . Simulation cell consists of sites with 32 terraces of 10 sites wide, separated by monoatomic steps. For comparison, experimental morphologies obtained for each regime are presented. Scan areas are .
(Color online) AFM images of silicon layers deposited on Si (001) misorientated of 1.5° towards [1-10] with deposited thickness of (a) 50, (b) 100, (c) 300, and (d) . Scan area is .
(Color online) Morphological evolution of (a) rms roughness and (b) correlation length as a function of experimental deposited thickness . (c) Height-height correlation function, , as a function of correlation distance calculated from the simulations at different deposited thickness.
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