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Effect of space charge polarization in radio frequency microelectromechanical system capacitive switch dielectric charging
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10.1063/1.2347278
/content/aip/journal/apl/89/10/10.1063/1.2347278
http://aip.metastore.ingenta.com/content/aip/journal/apl/89/10/10.1063/1.2347278
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Capacitance-voltage characteristic at , (엯) with bias ramping up and (●) with bias ramping down. The inset represents the device geometry.

Image of FIG. 2.
FIG. 2.

Capacitance transient response of MEMS switch obtained at . The symbols show the bridge bias.

Image of FIG. 3.
FIG. 3.

Arrhenius plot of process time scale for both polarity transients. The symbols are the same as in Fig. 2.

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/content/aip/journal/apl/89/10/10.1063/1.2347278
2006-09-06
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effect of space charge polarization in radio frequency microelectromechanical system capacitive switch dielectric charging
http://aip.metastore.ingenta.com/content/aip/journal/apl/89/10/10.1063/1.2347278
10.1063/1.2347278
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