1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Influence of phonon, geometry, impurity, and grain size on Copper line resistivity
Rent:
Rent this article for
USD
10.1063/1.2355435
/content/aip/journal/apl/89/11/10.1063/1.2355435
http://aip.metastore.ingenta.com/content/aip/journal/apl/89/11/10.1063/1.2355435

Figures

Image of FIG. 1.
FIG. 1.

Low temperature resistivity for linewidths from calculated from line resistance and areas determined from SEM cross sections.

Image of FIG. 2.
FIG. 2.

Electron channeling contrast image (ECCI) typical of the narrow Cu lines investigated.

Image of FIG. 3.
FIG. 3.

Resistivity vs linewidth at with analytical model fit parameters: , , , , and grain size equal to linewidth.

Image of FIG. 4.
FIG. 4.

Resistivity vs linewidth at . (a) Analytical model fit parameters: , , , , and grain size equal to the linewidth. (b) Analytical model fit parameters: , , , , and grain size equal to the linewidth and an uncertainty in grain size of for lines narrower than .

Tables

Generic image for table
Table I.

Relative electron scattering contribution from interface, grains, impurities, and bulk at 20 and for selected linewidths of 75, 250, and .

Loading

Article metrics loading...

/content/aip/journal/apl/89/11/10.1063/1.2355435
2006-09-15
2014-04-17
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Influence of phonon, geometry, impurity, and grain size on Copper line resistivity
http://aip.metastore.ingenta.com/content/aip/journal/apl/89/11/10.1063/1.2355435
10.1063/1.2355435
SEARCH_EXPAND_ITEM