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Correlation between plasma dynamics and porosity of Ge films synthesized by pulsed laser deposition
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10.1063/1.2356689
/content/aip/journal/apl/89/13/10.1063/1.2356689
http://aip.metastore.ingenta.com/content/aip/journal/apl/89/13/10.1063/1.2356689
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Flight distance as a function of the time of flight of the plasma front for He atmosphere pressures from .

Image of FIG. 2.
FIG. 2.

(a) Kinetic energy of the plasma front as a function of target-substrate distance (ranging from ) for different He pressures (from ); (b) kinetic energy as a function of background gas pressure for different target-substrate distances.

Image of FIG. 3.
FIG. 3.

SEM images of different types of films deposited by laser ablation at room temperature in inert gas atmosphere. Deposition conditions: target-substrate distance of , laser fluence of , and background He pressures of (a) , (b) , (c) , and (d) .

Image of FIG. 4.
FIG. 4.

Ge film density as a function of kinetic energy per atom of ablated species. Because the plasma front kinetic energy can be controlled indirectly via two parameters, i. e., gas pressure ( and ) and distance , we use the open and solid symbols to show when we varied the pressure and the distance, respectively. At the highest energies the density approaches the horizontal dashed line indicating the Ge bulk density of .

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/content/aip/journal/apl/89/13/10.1063/1.2356689
2006-09-25
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Correlation between plasma dynamics and porosity of Ge films synthesized by pulsed laser deposition
http://aip.metastore.ingenta.com/content/aip/journal/apl/89/13/10.1063/1.2356689
10.1063/1.2356689
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